Embedded microheating elements in polymeric micro channels for temperature control and fluid flow sensing
نویسندگان
چکیده
منابع مشابه
Embedded MicroHeating Elements in Polymeric MicroChannels for Temperature Control and Fluid Flow Sensing
This paper describes the first demonstration of temperature control and flow sensing of fluids using integrated circuit (IC)-based microheating elements embedded in microchannels molded in polydimethylsiloxane (PDMS). Fluid channels and connections to capillary tubing are molded in PDMS using a silicon wafer template. The PDMS film is then bonded to an IC that contains the micromachined microhe...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 2004
ISSN: 1044-677X
DOI: 10.6028/jres.109.025